JPS59130433A - ワイヤボンディング装置 - Google Patents

ワイヤボンディング装置

Info

Publication number
JPS59130433A
JPS59130433A JP58005463A JP546383A JPS59130433A JP S59130433 A JPS59130433 A JP S59130433A JP 58005463 A JP58005463 A JP 58005463A JP 546383 A JP546383 A JP 546383A JP S59130433 A JPS59130433 A JP S59130433A
Authority
JP
Japan
Prior art keywords
tool
arm
capillary
linear motor
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58005463A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0468776B2 (en]
Inventor
Tomio Kashihara
富雄 樫原
Katsuhiko Aoyanagi
青柳　克彦
Nobushi Suzuki
鈴木　悦四
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP58005463A priority Critical patent/JPS59130433A/ja
Publication of JPS59130433A publication Critical patent/JPS59130433A/ja
Publication of JPH0468776B2 publication Critical patent/JPH0468776B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301—Capillary
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)
JP58005463A 1983-01-17 1983-01-17 ワイヤボンディング装置 Granted JPS59130433A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58005463A JPS59130433A (ja) 1983-01-17 1983-01-17 ワイヤボンディング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58005463A JPS59130433A (ja) 1983-01-17 1983-01-17 ワイヤボンディング装置

Publications (2)

Publication Number Publication Date
JPS59130433A true JPS59130433A (ja) 1984-07-27
JPH0468776B2 JPH0468776B2 (en]) 1992-11-04

Family

ID=11611919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58005463A Granted JPS59130433A (ja) 1983-01-17 1983-01-17 ワイヤボンディング装置

Country Status (1)

Country Link
JP (1) JPS59130433A (en])

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01129430A (ja) * 1987-11-16 1989-05-22 Mitsubishi Electric Corp ワイヤボンデイング装置
JPH01175239A (ja) * 1987-11-19 1989-07-11 Shinkawa Ltd ボンデイング装置
US5060841A (en) * 1985-12-25 1991-10-29 Hitachi, Ltd. wire bonding method and apparatus and method of producing semiconductor device by use of wire bonding apparatus
US5148967A (en) * 1991-07-15 1992-09-22 Hughes Aircraft Company Apparatus and method for detecting missing interconnect material
US5950903A (en) * 1997-03-13 1999-09-14 F & K Delvotec Bondtechnik Gmbh Bonding head

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619631A (en) * 1979-07-27 1981-02-24 Hitachi Ltd Wire bonding device
JPS5630735A (en) * 1979-08-21 1981-03-27 Nec Corp Wire-bonding device
JPS5737250U (en]) * 1980-08-12 1982-02-27
JPS57188840A (en) * 1981-05-15 1982-11-19 Shinkawa Ltd Load variable mechanism in wire bonder

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619631A (en) * 1979-07-27 1981-02-24 Hitachi Ltd Wire bonding device
JPS5630735A (en) * 1979-08-21 1981-03-27 Nec Corp Wire-bonding device
JPS5737250U (en]) * 1980-08-12 1982-02-27
JPS57188840A (en) * 1981-05-15 1982-11-19 Shinkawa Ltd Load variable mechanism in wire bonder

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5060841A (en) * 1985-12-25 1991-10-29 Hitachi, Ltd. wire bonding method and apparatus and method of producing semiconductor device by use of wire bonding apparatus
JPH01129430A (ja) * 1987-11-16 1989-05-22 Mitsubishi Electric Corp ワイヤボンデイング装置
JPH01175239A (ja) * 1987-11-19 1989-07-11 Shinkawa Ltd ボンデイング装置
US5148967A (en) * 1991-07-15 1992-09-22 Hughes Aircraft Company Apparatus and method for detecting missing interconnect material
US5950903A (en) * 1997-03-13 1999-09-14 F & K Delvotec Bondtechnik Gmbh Bonding head

Also Published As

Publication number Publication date
JPH0468776B2 (en]) 1992-11-04

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